With its patented architecture, the Prismo UniMax® MOCVD system can accommodate up to 4 reactors and process up to 108x4” or 40x6” GaN based Blue/Green Mini LED wafers simultaneously. It is extendible to process 164x4” or 72x6” wafers through susceptor configuration change, and is also capable for 8” wafer processing. Each reactor is controlled independently ‒ a novel design that enables exceptional manufacturing flexibility. The Prismo UniMax® MOCVD system is engineered for high performance Mini LED production with its innovated local temperature adjustable heating system. It can deliver excellent wavelength uniformity and good reliability for Mini LED production. With its 785mm diameter susceptor, the Prismo UniMax® MOCVD system can significantly improve the production throughput and reduce the cost of ownership.
MOCVD solution for advanced display application with high-volume Mini LED production
Industry advanced in-situ, real-time monitoring system
Precise process parameters control
Automated and programmable maintenance routines
SEMI S2 certified with enhanced tool safety performance
ExExcellent process performance and wafer uniformity
Complies with highest semiconductor industry standards
Low cost-of-ownership (CoO) and easy serviceability
Superior UVC LED wafer capac
